Romanian Journal for Information Science and Technology (ROMJIST)

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ROMJIST is a publication of Romanian Academy,
Section for Information Science and Technology

Editor – in – Chief:
Academician Dan Dascalu

Secretariate (office):
Adriana Neagu
Adress for correspondence: romjist@romjist.ro

Editing of the printed version: Mihaela Marian (Publishing House of the Romanian Academy, Bucharest)

Sponsor: National Institute
for R & D in Microtechnology
(IMT Bucharest)

ROMJIST Volume 21, No. 1, 2018, pp. 49-60, Paper no. 580/2018
 

C. Pachiu, T. Sandu, C. Tibeica, A. Avram, L. M. Veca, R. Popa, M. Popescu, R. Gavrila, C. Popov, V. Avramescu
Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond

ABSTRACT: The fabrication of various suspended microstructures made from ultrananocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young’s modulus as well as the residual stress built in the ultrananocrystalline diamond film.

KEYWORDS: residual stress, ultrananocrystalline diamond, MEMS, suspended microstruc- tures

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