O. TRIEBL, T. GRASSER
Vector Discretization Schemes in Technology CAD Environments

Abstract.
In Technology CAD (TCAD) environments, a proper vector discretization in two or three dimensions is of crucial importance because physical models used in semiconductor device simulation tools depend on vector quantities. We discuss two discretization methods for Delaunay meshes that are based on the unstructured neighborhood information. In addition a comparison to an element based method is given. Overall good convergence is achieved by applying these methods in a TCAD environment for the calculation of the driving force, electric field, and the current density vector. An example simulation of a diode in breakdown and a bipolar structure in snap-back operation is presented.

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