Adina BRAGARU, Monica SIMION, Mihaela MIU, Teodora IGNAT, Irina KLEPS, Veronica ŞCHIOPU, Andrei AVRAM, Florin CRĂCIUNOIU
Study of the Nanostructurated Silicon Chemical Functionalization

Abstract. Chemical functionalization of semiconductor surfaces cover a broad range of potential applications ranging from surface passivation and stabilization to development of new strategies for chemical or biological species immobilization on the surface and detection / study of various interactions characterizing biological and chemical systems. Organic derivatization of semiconductor surfaces is an active field of research due to the importance of these materials in modern technologies. The microfabrication processes developed on silicon substrate are well-known and they allow obtaining structures suitable for integration into microelectronics platforms with chemical and biological functionality. In this paper, we report the functionalization with organic molecules of porous silicon internal surface which work as coupling agent (3-aminopropyl triethoxysilane-APTS) for biomedical applications. The test structures were characterized from morphological and compositional point of view using optical microscopy with fluorescence module and Fourier-transform infrared (FTIR) spectroscopy techniques. Moreover, porous silicon with fluorescent agent on its surface was analysed using the UC4 Microarray Scanner from Genomic Solutions in the view of future using in DNA microarray technology.