D. DUBUC, K. GRENIER, M. N. DO, J. P.
BUSQUERE, A. COUSTOU, B. DUCAROUGE, S. MELLE, L. MAZENQ, F. BOUCHRIHA, P. PONS,
3D Microsystem Integration for Microwave and Millimeter Wave Applications
This paper outlines the 3D microsystem integration concept of microwave and
millimeterwave applications through the use of the microtechnologies. The
resulting microsystems then feature high performances thanks to the combined use
of the SiGe and MEMS technologies and exhibit high compactness due to a 3D