Ciprian ILIESCU, Bangtao CHEN, Jianmin MIAO, Marioara AVRAM, Andrei Marius AVRAM
Inertial Sensors with Tunable Range

This paper presents a new and simple (two masks) fabrication process for capacitive inertial sensors using comb drive structures. A conductive silicon wafer is anodically bonded on Pyrex glass substrate. The high aspect ratio silicon structure was micromachined using deep RIE and released from the glass substrate by further deep RIE process due to the notching effect of the reflected charges on the glass. The spring stiffness was adjusted with another DRIE process. In this way, inertial sensors with different range can be process using same masks only by changing the spring stiffness.