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G. KIRIAKIDIS, N. KATSARAKIS, M.
KATHARAKIS, M. SUCHEA, K. GALATSIS, W. WLODARSKI, D. KOTZIAS
Metal Oxide Gas Sensors Exhibing Very Low Detection Limits
Abstract.
InOx films, in the thickness range of 10–725 nm, were grown by dc magnetron
sputtering. Their structural, electrical, and O3 and NO2 sensing properties were
analyzed at various temperatures. Structural investigations carried out by XRD
and AFM showed a strong correlation between crystallinity, surface topology and
gas sensitivity. Moreover, the electrical conductivity exhibited a change of
over six orders of magnitude during the processes of photoreduction and
oxidation. The films have shown sensitivities towards O3 of < 50 ppb and NO2 of
< 100 ppb, at temperatures from RT to 100°C. |