ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY
Volume 3, Number 1, 2000, 39 - 48

 

High Performances Silicon Micromachining
Based Structures for Millimeter-Wave Applications

B. Guillon, K. Grenier, T. Parra, P. Pons, J. Graffeuil, R. Plana
LAAS-CNRS, 7 Av du Colonel Roche, 31077 Toulouse, Cedex 04, France
E-mail : rplana@sige.com, plana@laas.fr

D. Cros, P. Blondy
IRCOM, 123 Av Albert Thomas, 87000 Limoges Cedex, France

J.L. Cazaux
Alcatel Space Industry, 26 Av J.F. Champollion, 31037 Toulouse, France

Abstract.
This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations finite element method based have been implemented to design the circuits. Coplanar transmission line featuring loss level in the 2 dB range up to 105 GHz have been achieved. An original silicon micromachined cavity using the whispering gallery modes properties have been realized exhibiting quality factor in the 10000 range at 95 GHz.