ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY
Volume 2, Number 1-2, 1999, 107 - 116

 

Review and Prospects for VPE, MOVPE,
MBE and CBE (MOMBE) of InP and Related Materials

Andrei MIRCEA, Francoise ALEXANDRE, Jean DECOBERT,
  Jean-Cristophe HARMAND, Abdallah OUGAZZADEN
France Telecom CNET/DTD, Bagneux France
E-mail: andrei.mireca@cnet.frencetelecom.fr

Leon GOLDSTEIN
Alcatel Alsthom Recherche, Marcoussis, France

Abstract.
The market for InP-based epitaxies is still small and the different production methods coexist. Novel sources may renew the interest in Solid Source MBE. In MOVPE and CBE the tendency is towards lower temperatures and increased safety. Two novel families of materials are studied. The main challenges are cheap optoelectronic devices for the subscriber access network and very high speed microelectronics.