ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY
Volume 1, Number 2, 1998, 127 - 140

 

New Parameters For Describing Surface Morphology
From Atomic Force Microscopy Images

C. Flueraru, S. Nastase
National Institute of Microtechnology
PO Box 27-17, 77550, Bucharest, Romania
E-mail:  cfleraru@imt.ro, steliann@imt.ro

 

Abstract.
The average friction coefficient and fractal roughness as new parameters for surface characterization are presented. The measurement conditions for roughness were analyzed and the importance of the applied force was proven. The quantitative measurements of friction force versus applied force are presented. We found that the average friction force linearly increased with applied force and was reversible with load. The connection between the average friction coefficient and the roughness surface was experimentally demonstrated. The investigated images are the surface of LPCVD polysilicon. These images are analyzed using fractal theory to illustrate the advantage of treating surface morphology from the fractal point of view.