Membrane Supported Spiral Inductors for a Butterworth Low Pass Filter in the Low GHz Frequency Range

The paper describes a new approach for the design of lumped components supported on high resistivity silicon substrates as well as on thin dielectric membranes obtained by silicon micromachining. The method employs intensive electromagnetic modelling and layout optimization The influence of various geometrical parameters (number of coils, width of the line, thickness of the metalization, etc.) is analyzed. The quality factor for micromachined inductors is compared with those obtained for the bulk silicon supported structures and a significant increase of this parameter is observed for the membrane supported structures. The simulation were used in the design modelling and manufacturing of micromachined L-C Butterworth filter structures in the 1–10 GHz frequency band.

Keywords: electromagnetic simulations, low-pass, lumped components, atypically design.