Romanian Journal of Information Science and Technology (ROMJIST)

An open – access publication

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ROMJIST is a publication of Romanian Academy,
Section for Information Science and Technology

Editor – in – Chief:
Radu-Emil Precup

Honorary Co-Editors-in-Chief:
Horia-Nicolai Teodorescu
Gheorghe Stefan

Secretariate (office):
Adriana Apostol
Adress for correspondence: romjist@nano-link.net (after 1st of January, 2019)

Founding Editor-in-Chief
(until 10th of February, 2021):
Dan Dascalu

Editing of the printed version: Mihaela Marian (Publishing House of the Romanian Academy, Bucharest)

Technical editor
of the on-line version:
Lucian Milea (University POLITEHNICA of Bucharest)

Sponsor:
• National Institute for R & D
in Microtechnologies
(IMT Bucharest), www.imt.ro

ROMJIST Volume 21, No. 1, 2018, pp. 49-60
 

C. Pachiu, T. Sandu, C. Tibeica, A. Avram, L. M. Veca, R. Popa, M. Popescu, R. Gavrila, C. Popov, V. Avramescu
Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond

ABSTRACT: The fabrication of various suspended microstructures made from ultrananocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young’s modulus as well as the residual stress built in the ultrananocrystalline diamond film.

KEYWORDS: residual stress, ultrananocrystalline diamond, MEMS, suspended microstruc- tures

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