G. DE PASQUALE, A. SOMA
Reliability in MEMS: Design of Gold Devices for
Mechanical Fatigue Tests
Abstract. Design and modelling of MEMS test structures for the analysis
of fatigue damage occurring in oscillating microstructures is presented. Finite
Element models are realized to design specimen shapes and electro-mechanical
actuation parameters. Two different structural geometries are defined to obtain
both traction and shear tensile specimen actuations through the actuation of
out-of-plane movable plates.
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